图像测量仪是由机械主机、位移传感器、图像检测系统、控制部分和测量软件等组成的测量仪器，可以测量各种复杂形状零件的表面坐标点。 验收时，下列计量特性的校准结果不得超过合同或制造厂规定的技术要求。
1. 术语
1.焦平面尺寸测量的示值误差（Exy）
平行于焦平面方向的尺寸测量指示误差。
笔记：
1）本规范中XY平面默认与焦平面平行，如果不平行，则必须做相应的标记（如Exz或Eyz）
2）如果只在平行于X轴的方向或只在平行于Y轴的方向上得到示值误差，可以用Ex或Ey表示。
2、光轴方向的尺寸测量指示误差（Ez）
平行于图像检测系统光轴方向的尺寸测量指示误差。
注意：在本规范中，Z 轴默认平行于成像系统的光轴。 如果不是，则必须进行相应的标记（如 Ex 或 Ey）
3、图像检测系统的尺寸测量指示误差（Ev）
在图像测量仪的移动平台和图像检测系统不移动的情况下，图像检测系统的视场内的尺寸测量指示误差。
4.各截面测量结果的一致性（Es）
影像测量仪在沿光轴对不同截面进行测量时，各截面坐标原点在XY平面上投影的一致性程度。
5. 二维检测误差（P2D）
使用图像测量仪测量平面圆形物理标准的半径变化范围。
6.图像探针检测误差（Py）
用影像测量仪测量影像检测系统视场内平面圆形物体标准的半径变化范围。
7、变焦检测误差（Pz）
变倍图像检测系统的图像测量仪用于测量同一个圆形目标，以及不同倍率下目标圆心坐标指示值的范围。
2、校准项目
1、尺寸测量示值误差
对于具有沿光轴测量功能的图像测量仪器，应校准以下尺寸测量指示误差：Exy、Ez、Ev。
笔记：
1) Ev仅适用于图像检测系统视场内具有测量功能的图像测量仪器。
2) 工作台不可移动的影像测量仪器，只需校准Ev。
对于具有沿光轴定位功能的影像测量仪和只能在任意二维平面上进行测量的影像测量仪，应标定以下尺寸测量示值误差：Exy、Ev；
笔记：
1) Ev 仅适用于可以在图像检测系统的视场内进行测量的图像测量仪器。
2) 工作台不可移动的影像测量仪器，只需校准Ev。
2.各截面测量结果的一致性（Es）
3.检测错误
3.1。 二维检测误差 (P2D)
注：工作台不能移动的影像测量仪无此要求。
3.2. 图像探针检测误差 (Py)
4、变焦检测误差（Pz）
三、注意事项
校准时，应严格按照制造商提供的仪器使用说明书进行操作。 应特别注意以下几个方面：
a) 仪器启动/预热程序；
b) 测量系统的校准；
c) 成像系统的放大倍数；
d) 照明条件。
Image measuring instrument is a measuring instrument composed of mechanical host, displacement sensor, image detection system, control part and measurement software, which can measure the coordinate points on the surface of various complex shapes of parts. At the time of acceptance, the calibration results of the following measurement characteristics shall not exceed the technical requirements specified by the contract or the manufacturer.
A term,
1. Focusing plane size measurement error (Exy)
Error of size measurement in the direction parallel to the focusing plane.
Note:
1) In this specification, the XY plane is parallel to the focusing plane by default, otherwise it should be labeled accordingly (e.g. Exz or Eyz)
2) If the indication error obtained only along the direction parallel to the X axis or the Y axis, it can be expressed as Ex or Ey.
2. Error of optical axis dimension measurement (Ez)
Error of size measurement in the direction parallel to the optical axis of the image detection system.
Note: In this specification, the z-axis is by default parallel to the optical axis of the imaging system, otherwise it should be marked accordingly (e.g. Ex or Ey)
3. Size measurement error of image detection system (Ev)
In the case that the moving platform of the image measuring instrument and the image detection system do not move, the size measurement error in the field of view of the image detection system.
4. Measurement results of each section -- Compliance (Es)
The consistency of the coordinates of the origin of each section projected onto the XY plane when the image measuring instrument is measuring on different sections along the optical axis.
5. Two-dimensional detection error (P2D)
The radius variation range of the plane circular standard was measured with an image measuring instrument.
6. Image probe detection error (Py)
The radius variation range of the plane circular physical standard in the field of view of the image detection system was measured with an image measuring instrument.
7. Multiplication detection error (Pz)
The image measuring instrument of the magnification image detection system is used to measure the range of the target center coordinates under different magnification.
Ii. Calibration items
1. Error of size measurement
For the image measuring instrument with measuring function along the optical axis, the following size measurement error should be calibrated: Exy, Ez, Ev.
Note:
1) Ev is only applicable to the image measuring instrument with measurement function within the field of view of the image detection system.
2) For an image measuring instrument with an immovable table, just calibrate the Ev.
For the image measuring instrument with positioning function along the optical axis and the image measuring instrument which can only make measurement in any two-dimensional plane, the following size measurement error should be calibrated: Exy, Ev;
Note:
1) Ev is only applicable to the image measuring instrument that can measure within the field of view of the image detection system.
2) For an image measuring instrument with an immovable table, just calibrate the Ev.
2. Consistency of measurement results of each section (Es)
3. Detection error
3.1 Two-dimensional detection error (P2D)
Note: There is no requirement for image measuring instrument with immovable table.
3.2 Image Probe detection error (Py)
4. Multiplication detection error (Pz)
Three, notes
When performing calibration, strictly follow the instrument instructions provided by the manufacturer. Special attention should be paid to:
A) Instrument startup/warm-up procedure;
B) Calibration of measurement system;
C) Magnification of image system;
D) Lighting conditions.
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